EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a higher H2 pumping speed compared to screw type vacuum pumps.

Key features

• Lowest power consumption: Decreased user’s Cost of Ownership and reduced company’s carbon emissions
• Smaller weight and dimensions compared to earlier models: User friendly
• Higher H2 pumping speed compared to screw type vacuum pumps
• Flexible rotation speed and idle mode as standard: Further power saving

Technical characteristics

• Multi-stage lobe design engineered for harsh application
• Enhanced by-procuct capability
• Enhanced reliability through high torque motors
• Main pump and booster pump with energy saving DC motors
• Intelligent control system
• Low noise and low vibration
• Adjustable pumping speed by RPM variation
• Very small footprint
• Low consumption of electrical power, cooling water and nitrogen
• Idle mode for additional energy savings