The Process Sense™ TFS™ Sensor is an improvement in the traditional endpoint technique of non-dispersive infrared (NDIR). Tunable Filter Spectroscopy (TFS) is a spectroscopic technique capable of generating a “mini-scan,” producing a slice of spectra in the infrared band. The scan provides absorption peaks used to select compounds and provide concentration values.

MKS Instruments’ platform of innovative optical analyzers based on Tunable Filter Spectroscopy (TFS™) provides real-time gas analysis, while delivering customers a substantially lower total cost of ownership. TFS™ can be utilized from UV (Ultra-Violet) through IR (Infra-Red) spectral regions. MKS TFS™ sensor platforms have been on the market since 2008 with more than 2500 systems deployed.

Key features

• Reduce chamber clean times and cost
• Accurate determination of chamber clean endpoint
• Minimize particle events
• Increase wafer throughput of CVD tool
• Reduce NF3 usage