Designed specifically for load lock environments, the 901 Plus (901P) Loadlock Transducer (LLT) combines Piezo and Micro Pirani™ vacuum sensor technology. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.

• Absolute pressure measurement from 1,000 to 10^-5 Torr
• 3-sensor functionality in a single transducer for a wide measurement range
• Analog, RS232, RS485, & EtherCAT® versions
• Optional integrated touch-screen display available for local pressure indication
• Fast, accurate and repeatable pressure measurements reduces process cycle time
• Three optional set points with fast response time for reliable process control