The Granville-Phillips® 390 Micro-Ion® module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precise indication of vacuum chamber differential pressure from ambient.

• Continuous pressure measurement from 10^-9 Torr to atmosphere
• Precision differential pressure measurement at atmosphere
• Dual ionization gauge filaments increase equipment uptime
• Optional set point relays for process control
• Analog, RS-485, DeviceNet or EtherCAT interfaces
• Optional graphical LCD display