Beläggningssystem
Q150R Plus
Versatile rotary pumped carbon and/or sputter coater for SEM
A low-vacuum coater suitable for use with W-SEM up to magnifications of x50k using gold or gold/palladium, or up to x100k using platinum (optional vacuum hose assembly required). It is recommended for carbon coating SEM samples for elemental analysis.
Key features
- Capable of achieving vacuum of 2 x 10-3 mbar
- New touch and swipe capacitive screen
- USB port for upgrades and download of log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user, according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Interchangeable stage options and plug-in heads
Options
- Film thickness monitoring
- Wide range of drop-in style specimen stages
- Glow discharge
- Metal evaporation
- Additional inserts for quick metal change
Configurations
- Q150R S Plus – an automatic sputter coater for non-oxidising metals
- Q150R E Plus – an automatic carbon cord coater for SEM applications such as EDS and WDS
- Q150R ES Plus – a combined system system capable of both sputtering and carbon coating
Recommended applications
- Low and medium magnifications
- SE signal boost (1nm or less)
- Table-top SEM coating
- Elemental analysis
- Copper metallisation layers
Specifikationer
Application notes
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