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974B QUADMAG™ COLD CATHODE - MICROPIRANI™ - PIEZO VACUUM PRESSURE TRANSDUCERS

The 974B QuadMag™ vacuum transducer offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani and Piezo differential sensor technologies. The 974B has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design.

 

  • Absolute measurement from 10-8 Torr to atmosphere
  • Cold cathode anode module is user serviceable to decrease downtime
  • MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure
  • Ease of operation via analog output, RS232, and RS485
  • Optional integrated touch-screen display available for local pressure indication, etc.
  • Small footprint design provides a compact transducer solution

Tillbehör

AGC-100/AGD-100

Single channel active gauge display and control unit