A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.

Key features

• ​Compact design
• Smooth kinematic motion
• Reliable and rigid construction
• True UHV performance
• Bakeable to 250°C
• Demountable bellows assembly with min 5,000 cycles

The CLSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options.

The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or Stepper motor. Each CLSM can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution.