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972B DUALMAG™ COLD CATHODE AND MICROPIRANI™ VACUUM PRESSURE TRANSDUCERS

The 972B DualMag™ vacuum transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure while offering 1-2 decades lower measuring range than a traditional pirani gauge. By lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended.

 

  • Absolute measurement from 10-8 Torr to atmosphere
  • Cold cathode anode module design is user serviceable to decrease downtime
  • RS232, RS485 or EtherCAT®/Analog communications
  • MEMS based MicroPirani sensor for low auto cold cathode turn-on pressure
  • MicroPirani is automatically zeroed during pump down cycle for improved accuracy
  • Small footprint design provides a compact transducer solution

Tillbehör

AGC-100/AGD-100

Single channel active gauge display and control unit