CAPACITANCE DIAPHRAGM, MEMS PIRANI, PIEZO TRANSDUCER
 

• Measurement range of 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr)
• Gas-independent sensor from 5×10-3 to 1333 mbar
• Ultra-wide range high performance MEMS Pirani sensor
• Robust ceramic capacitance diaphragm gauge  
• Ambient pressure referenced output signal
• Atmospheric switching functionality
• Mountable in any orientation without impact on performance.
• Programmable voltage output signal with other vendor emulation
• Digital RS-232 or RS-485 interface
• Three solid-state set points for vacuum process controlling
• Drop-in replacement for MKS 901P Loadlock transducer
• Compact multi-sensor solutions