Rowaco AB

Förbrukningsmaterial

Sputter targets

High-purity sputter targets for a wide variety of applications and sputter coaters

We have a wide range of sputter targets for routine table-top sputter coaters as well as custom targets for advanced coating systems.

Not sure of which dimensions to use with your coater? Check out the Target selection guide in the resources below, or simply contact us – we’d be happy to help!

Disc type target diameters

Ø57 mm
Ø54 mm
Ø50 mm
Ø24 mm
Ø19 mm
Ø60 mm (w or w/o target holder substrate)
Ø58 mm (w target holder substrate)

Annular target diameters (OD / ID)

82 mm / 60 mm (w support ring)
3 inch / 2 inch (w support ring)

Target materials
The target materials below have distinct properties, and are suitable for different applications. For low-vacuum sputter coaters, the noble non-oxidising target materials will work. Among them, platinum will yield the smallest grain size but the required vacuum level for Pt can sometimes take significant time to reach with low-vacuum systems.

For high-vacuum sputter coaters, chromium and iridium will give fine-grain coatings for high-resolution imaging. The downside with chromium is that it oxidises quite rapidly, making it unsuitable for samples that need to be archived and revisited. Iridium is a much better choice in these cases, but has the drawback of not being as affordable as chromium. Optimizing the sputter parameters can also improve the grain size and overall appearance of the coating, thereby minimising the risk of obscuring important features in the samples (see Application note below)

Some of the most used and readily available target materials are listed below.