NEXT GENERATION MEMS PIRANI TRANSDUCER
 

Measurement range of 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr)
Ultra-wide range high performance MEMS Pirani sensor
Unmatched price-performance ratio
Precision gas-independent measurement from 2 to 1333 mbar
Mountable in any orientation without impact on performance.
Programmable voltage output signal with other vendor emulation
Digital RS-232 or RS-485 interface
Three solid-state set points for vacuum process controlling
Optional Ceramic or Parylene sensor protection for corrosive applications
Drop-in replacement for MKS 925 MicroPirani™ and 910
Robust, compact stainless steel flange and enclosure design