The GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus^™, EtherCAT^®, or DeviceNet^™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.

A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM100A mass flow controller has an electropolished surface finish.

Key features

• Patented thermal sensor design for exceptional zero stability
• Percent of set point accuracy enables precise process control
• Embedded user interface – easily change device range & user gas, monitor & measure performance

Recommended applications

GM100A is a general purpose MFC designed for a wide variety of applications requiring flow control capability from 50 slm to 100 slm Full Scale, N₂ equivalent, and is also suitable for high purity processes.