Beläggningssystem
Q150T Plus
Versatile turbo-pumped carbon and/or
sputter coater for high-resolution SEM
With its turbomolecular pump, this coater achieves vacuum levels down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.
Key features
- New touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one machine
- New software sorts recipes per user according to recent use
- 16GB of memory can store more than 1000 recipes
- New multi-colour LED visual status indicator
- Capable of achieving vacuum of 5 x 10-5 mbar
Options
- Film thickness monitoring
- Wide range of drop-in style specimen stages
- Full range vacuum gauge
- Glow discharge
- Metal evaporation
- Additional inserts for quick metal change
Configurations
- Q150T S Plus – an automatic sputter coater for oxidising metals
- Q150T E Plus – an automatic carbon cord coater for SEM applications such as EDS and WDS
- Q150T ES Plus – a combined system system capable of both sputtering and carbon coating
Recommended applications
- High-resolution magnification SEM
- Protective platinum layers for FIB
- R&D of corrosion-, friction-, and wear protective layers
- Protective layers on medical devices
- BSE imaging
- EDX, WDS, EBSD analysis
- Carbon coating of replicas
Specifikationer
Application notes
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