Kryopumpar

Marathon® CP-8 Cryopump

The Marathon CP-8 Cryopump is one of SHI’s smallest cryopumps in the Marathon CP series.  It utilizes SHI’s CH-204 10K Cryocooler and features Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with water-cooled helium compressors.

 

Available Configurations

Industry-Standard Flanges
Standard Manual Operation
Optional Fully-Automated Operation with Marathon® Cryopump Controller
Two (2) cryopumps operating with one (1) F-70L/H Compressor
Displex® Technology


Standard Scope of Supply

CP-8 Cryopump
F-20L or F-70L/H Compressor
3 m (10 ft.) Flexible Gas Lines
3 m (10 ft.)  Cold Head Cable
Tool Kit

Tillbehör

AGC-100/AGD-100

Single channel active gauge display and control unit