Kryopumpar
Marathon® CP-8 Cryopump
The Marathon CP-8 Cryopump is one of SHI’s smallest cryopumps in the Marathon CP series. It utilizes SHI’s CH-204 10K Cryocooler and features Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator. It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber. It operates with water-cooled helium compressors.
Available Configurations
Industry-Standard Flanges
Standard Manual Operation
Optional Fully-Automated Operation with Marathon® Cryopump Controller
Two (2) cryopumps operating with one (1) F-70L/H Compressor
Displex® Technology
Standard Scope of Supply
CP-8 Cryopump
F-20L or F-70L/H Compressor
3 m (10 ft.) Flexible Gas Lines
3 m (10 ft.) Cold Head Cable
Tool Kit

Specifikationer
Leverantör
Tillbehör

AGC-100/AGD-100
Single channel active gauge display and control unit