HEX SeriesModular benchtop PVD system
The HEX platform offers an un-matched level of user control and customization. It can be equipped with a wide range of deposition instruments including E-beam evaporators (single and four pocket), RF & DC sputtering sources, low temperature organic evaporators and thermal evaporators.
Each of the six side panels are removable and can be equipped with any combination of the deposition sources listed above enabling multi layer, multi process deposition without breaking vacuum. There are also many system options available such as; quartz crystal monitoring, high vacuum load locks and heated, cooled, rotating or static sample stages.The systems can be operated both manually and automatically.
In-situ measurement options are also available for all of the models in the HEX series, enabling the integration of various optical and spectroscopic techniques and the systems can be integrated into a glovebox for research that requires an inert atmosphere.
The HEX series is used within universities and laboratories worldwide for applications including; research into new materials, sputter deposition, contact metallisation, coating of electrical contacts, lift off, EM sample preparation and teaching and training. The HEX’s modularity and ease of use make it the ideal tool for any clean room and perfect for thin film training programs.