IM100AIP66-rated multi-gas, multirange metal sealed 100 slm mass flow controller
The I-Series IM100A is a general purpose, metal-sealed MFC, with an IP66-rated enclosure is well suited for harsh environments where resistance to liquid or dust ingress is critical.
It is capable of Full Scale ranges from 50 to 100 slm (N2 equivalent)
- Flow rates from 50 to 100 slm
- Metal-sealed MFC with Teflon valve plug, MFM is all metal
- Less than 750 millisecond settling time
Analog and Profibus® I/O
The IM100A is a digitally controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. The digital control electronics, using the latest in MKS control algorithms, provide fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas.
Standard 3 inch Footprint
The IM100A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.
Metal Sealed with Electropolished Internal Surface Finish
The IM100A metal sealed MFC, with its electropolished surface finish, is well suited for use in high purity process applications and is available with a normally closed valve. An mass flow meter version is also available and is not electropolished.
Percent of Setpoint Accuracy
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
Embedded User Interface
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
Patented Thermal Sensor
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.