226A Baratron

General performance transducers

Key features

  • Differential pressure measurement from 1000 to 0.2 Torr
  • Gas composition independent pressure measurement
  • Fully-welded Inconel sensor resists corrosion
  • Four different analog output signals for unidirectional or bidirectional calibrations

Baratron Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Differential Pressure Measurement

Differential capacitance manometers can be connected to any pressure or vacuum source for use as the reference pressure. These manometers read the difference in pressure between the inlet tube and the reference cavity at the backside of the electrode. Differential pressure transducers can be used to measure either the true differential pressure or vacuum between two locations, or the reference side of the product can be left open to provide a true reference to local atmospheric pressure. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems.

Inconel Nickel Alloy Construction

The patented capacitance sensor is built entirely from Inconel nickel alloys on its measurement side, which offers superior corrosion resistance over long periods of time. Inconel construction also offers high overpressure tolerances that reduce errors due to line pressure spikes, and high burst pressure ratings that contribute to overall system safety.

Wide Variety of Proportional Analog Outputs

The 226A/228A provide a high-level analog output signal that is linear with pressure. It can operate on either ±15VDC or +24VDC input voltage, and it offers four different analog output signals (0-10V, 0-5V, 0-1V, and 4-20 mA) for use in nearly any control or data acquisition system. The sensor and electronics are mounted in a rugged industrial-grade housing that has high immunity and isolation from RF and EM interference

Twelve Different Fitting Types

These Baratron differential capacitance manometers can be equipped with any of twelve (12) different fittings on either the measurement or reference sides, including common industrial and semiconductor-industry standards like VCR, NW-KF, VCO, and NPT.

KRISTIAN FLODSTRÖM Product specialist Vacuum technology 010-155 03 11