Q300T T Plus

Large-chamber sputter coater
Fitted with three sputtering heads to ensure even deposition of individual large specimens up to 8″/200mm or multiple specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM.

Key features

  • Ultimate vacuum of 1 x 10-6 mbar or less possible
  • New touch and swipe capacitive screen
  • USB port for upgrades and download of process log files
  • Multiple-use profiles can be set up on one machine
  • New software sorts recipes per user according to recent use
  • 16GB of memory can store more than 1000 recipes
  • New multi-colour LED visual status indicator
  • Interchangeable stage options
  • Three sputter heads for larger area deposition of different materials

Recommended applications

  • Wafer Inspection
  • Multiple sample preparation for SEM

Specifikationer

Relaterade dokument

Leverantör