EBARA is launching a new vacuum pump design for harsh processes. The pumps have smaller dimensions and a 50% lower power consumption than the EST series. EV-M series have generally a higher H2 pumping speed compared to screw type vacuum pumps.
Key features
Lowest power consumption: Decreased user’s Cost of Ownership and reduced company’s carbon emissions
Smaller weight and dimensions compared to earlier models: User friendly
Higher H2 pumping speed compared to screw type vacuum pumps
Flexible rotation speed and idle mode as standard: Further power saving
Technical characteristics
Multi-stage lobe design engineered for harsh application
Enhanced by-procuct capability
Enhanced reliability through high torque motors
Main pump and booster pump with energy saving DC motors
Intelligent control system
Low noise and low vibration
Adjustable pumping speed by RPM variation
Very small footprint
Low consumption of electrical power, cooling water and nitrogen
