Model ESA Dry Vacuum Pumps, special applications
High pumping speed, compact size
The models ESA200W, ESA300W and ESA500W are the right choice for the rapid evacuation of large volume chambers as the load lock and transfer chambers in FPD and LCD process systems.
- Low Cost of Ownership [power, N2, water, footprint, volume, weight]
- Variable pumping speed to match application requirements
- State-of-the-art control and monitoring devices
- Idle mode can be employed for increased utility savings