HPT-300 & HPT-500

Low pressure plasma treatment systems
Benchtop plasma treatment systems for surface activation, cleaning and modification of a wide range of materials including polymers, metals, glass and ceramics. Available in single or dual gas inlet versions and with onboard gas mixing manifold, the HPT-300/500 systems are able to handle a wide range of gases for optimised treatments, including air, oxygen, hydrogen, argon, nitrogen and many others.


The HPT-300 system features a 200mm x 200mm (~12.5L) rectangular plasma process chamber in stainless steel with vacuum compatible materials throughout. The HPT-500 feature a 240 x 240mm (~23L) rectangular plasma process chamber respectively. Both models feature removable parts/carrier trays which allow treatment of larger parts or many more smaller parts per batch.

The base model of each system has a single gas inlet and optional second gas or vapour delivery inlet. The units can be prepared so that either option can be added at a later time if required, ensuring that future requirements can be accommodated without expensive reconfiguration.

An optional vapour delivery inlet extends the use to liquid precursors and a corrosion-resistant version expands the choice even further to address specific material treatments including;

  • Plasma cleaning
  • Plasma surface activation to improve adhesion
  • Functional plasma coatings
  • Plasma etching
  • PDMS & microfluidic devices
  • PEEK & other engineering polymers
  • PTFE
  • Metals
  • Ceramics
  • Glass & optical devices

Repeatable and Reliable

With precision digital mass flow controllers and integrated pressure gauge, the HPT-300 & 500 models deliver unmatched reliability and repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves.


  • Compact benchtop units
  • User friendly
  • TFT interface
  • Recipe store
  • Fast treatment time
  • Precise
  • Repeatable
  • No hazardous emissions

Henniker’s proprietary, high stability HPS plasma generator is continuously variable over the entire 0-300W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.

Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.

KRISTIAN FLODSTRÖM Product specialist Surface technology 010-155 03 11