910 DualTrans MicroPiraniAbsolute Piezo Vacuum Transducers
Designed specifically for wide-range pressure measurement applications, the 910 Transducer combines Piezo and Micro Pirani sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
- Fast, accurate and repeatable pressure measurements reduces process cycle time
- Optional 3 set points with fast response time for reliable process control
- Optional integrated touch-screen display available for local pressure indication etc
MicroPirani Sensor Technology
Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy.
Piezo Absolute Pressure Sensor
The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr.
Analog Pressure Output
The 910 also has an analog pressure output of 1VDC/ decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.
RS232 or RS485 Digital Communication
The 910 has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.
Process Control Relays
The 910 has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement.
The compact design of these vacuum transducers significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.