Digitally-controlled mass flow controller

Metal sealed MFC for flow rates up to 50 slm

Multi-gas, multirange, metal sealed MFC with a meter option

For flow rates up to 20 slm

Multi-gas, multirange, metal sealed MFC for flow rates up to 50 slm

Multi-gas, multirange, metal sealed MFC with a meter option

Multi-gas, multirange, elastomer sealed MFC for flow rates up to 300 slm

Multi-gas, multirange, elastomer sealed MFC for flow rates up to 300 slm

Multi-gas, multirange, elastomer sealed 100 to 300 slm mass flow controllers

High performance multi-gas, multirange 5 to 50,000 sccm mass flow controllers

High performance pressure-insensitive, multi-gas, multirange 5 sccm to 50 slm mass flow controllers

High performance, high flow 250 slm mass flow controllers

Vapor source mass flow controller with viscous choked flow

Vapor mass flow controllers

Elastomer-sealed 50 to 300 slm mass flow controller

Elastomer-sealed 50 to 300 slm mass flow meter

Metal sealed pressure-based 2 to 20 sccm mass flow controller

Low pressure drop, metal sealed, 2 to 20 sccm mass flow controller